Micromachined high-g accelerometers : a review
This Topical Review reviews research and commercial development of high-g micromachined accelerometers. Emphasis is placed on different high-g sensing schemes and popular design templates used to achieve high-g sensing. Additionally, trends in high-g micromachined accelerometer development both in r...
Saved in:
Main Authors: | Narasimhan, Vinayak, Li, Holden, Miao, Jianmin |
---|---|
Other Authors: | School of Mechanical and Aerospace Engineering |
Format: | Article |
Language: | English |
Published: |
2015
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/107207 http://hdl.handle.net/10220/25338 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Nanyang Technological University |
Language: | English |
Similar Items
-
High-G inertial MEMS accelerometers
by: Vinayak Narasimhan
Published: (2015) -
Monolithic CMOS-MEMS integration for high-g accelerometers
by: Narasimhan, Vinayak, et al.
Published: (2015) -
A micromachined condenser microphone with SU-8 back plate
by: Tan, Zhengyi.
Published: (2010) -
Development of a polymeric micro fuel cell containing laser-micromachined flow channels
by: Chan, Siew Hwa, et al.
Published: (2014) -
Realization of desktop 3D printer through micromachined active pump matrix
by: Gong, Thomas Haiqing.
Published: (2008)