Micromachined high-g accelerometers : a review

• Main Authors: Narasimhan, Vinayak, Li, Holden, Miao, Jianmin
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2015
• Subjects: DRNTU::Engineering::Mechanical engineering::Mechatronics
• Online Access: https://hdl.handle.net/10356/107207; http://hdl.handle.net/10220/25338
• Institution: Nanyang Technological University

This Topical Review reviews research and commercial development of high-g micromachined accelerometers. Emphasis is placed on different high-g sensing schemes and popular design templates used to achieve high-g sensing. Additionally, trends in high-g micromachined accelerometer development both in r...