The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM

The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM

The paper briefly overviewed electron-beam radiation damage and its impacts on physical failure analysis by SEM, FIB and TEM. Based on our electron radiation study on some typical electron-beam sensitive materials, we discussed some interesting results associated with electron radiation damage to Lk...

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Main Authors: Liu, Binghai, Hua, Younan, Dong, Zhili, Tan, Pik Kee, Zhao, Yuzhe, Mo, Zhiqiang, Lam, Jeffrey, Mai, Zhihong
Other Authors: School of Materials Science & Engineering
Format: Conference or Workshop Item
Language:English
Published: 2020
Subjects:
Engineering::Materials
Electron Beam Sensitive
Electron Beam Radiation
Online Access:https://hdl.handle.net/10356/140386
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1403862020-06-01T10:21:14Z The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM Liu, Binghai Hua, Younan Dong, Zhili Tan, Pik Kee Zhao, Yuzhe Mo, Zhiqiang Lam, Jeffrey Mai, Zhihong School of Materials Science & Engineering 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Engineering::Materials Electron Beam Sensitive Electron Beam Radiation The paper briefly overviewed electron-beam radiation damage and its impacts on physical failure analysis by SEM, FIB and TEM. Based on our electron radiation study on some typical electron-beam sensitive materials, we discussed some interesting results associated with electron radiation damage to Lk/ULK, silicon nitride and CoFeB thin film materials in semiconductor and MRAM devices. The details included radiation induced microstructure changes., material diffusion and phase transformation. The underlying mechanism was also briefly discussed for electron radiation damage to different materials. 2020-05-28T08:37:53Z 2020-05-28T08:37:53Z 2018 Conference Paper Liu, B., Hua, Y., Dong, Z., Tan, P. K., Zhao, Y., Mo, Z., . . . Mai, Z. (2018). The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM. Proceedings of the 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA). doi:10.1109/IPFA.2018.8452485 978-1-5386-4930-5 1946-1550 https://hdl.handle.net/10356/140386 10.1109/IPFA.2018.8452485 en © 2018 IEEE. All rights reserved.
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic Engineering::Materials
Electron Beam Sensitive
Electron Beam Radiation
spellingShingle Engineering::Materials
Electron Beam Sensitive
Electron Beam Radiation
Liu, Binghai
Hua, Younan
Dong, Zhili
Tan, Pik Kee
Zhao, Yuzhe
Mo, Zhiqiang
Lam, Jeffrey
Mai, Zhihong
The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM
description The paper briefly overviewed electron-beam radiation damage and its impacts on physical failure analysis by SEM, FIB and TEM. Based on our electron radiation study on some typical electron-beam sensitive materials, we discussed some interesting results associated with electron radiation damage to Lk/ULK, silicon nitride and CoFeB thin film materials in semiconductor and MRAM devices. The details included radiation induced microstructure changes., material diffusion and phase transformation. The underlying mechanism was also briefly discussed for electron radiation damage to different materials.
author2 School of Materials Science & Engineering
author_facet School of Materials Science & Engineering
Liu, Binghai
Hua, Younan
Dong, Zhili
Tan, Pik Kee
Zhao, Yuzhe
Mo, Zhiqiang
Lam, Jeffrey
Mai, Zhihong
format Conference or Workshop Item
author Liu, Binghai
Hua, Younan
Dong, Zhili
Tan, Pik Kee
Zhao, Yuzhe
Mo, Zhiqiang
Lam, Jeffrey
Mai, Zhihong
author_sort Liu, Binghai
title The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM
title_short The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM
title_full The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM
title_fullStr The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM
title_full_unstemmed The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM
title_sort overview of the impacts of electron radiation on semiconductor failure analysis by sem, fib and tem
publishDate 2020
url https://hdl.handle.net/10356/140386
_version_ 1681058418680397824

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