The overview of the impacts of electron radiation on semiconductor failure analysis by SEM, FIB and TEM

• Main Authors: Liu, Binghai, Hua, Younan, Dong, Zhili, Tan, Pik Kee, Zhao, Yuzhe, Mo, Zhiqiang, Lam, Jeffrey, Mai, Zhihong
• Other Authors: School of Materials Science & Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2020
• Subjects: Engineering::Materials; Electron Beam Sensitive; Electron Beam Radiation
• Online Access: https://hdl.handle.net/10356/140386
• Institution: Nanyang Technological University

The paper briefly overviewed electron-beam radiation damage and its impacts on physical failure analysis by SEM, FIB and TEM. Based on our electron radiation study on some typical electron-beam sensitive materials, we discussed some interesting results associated with electron radiation damage to Lk...