An application of incremental scheduling to a cluster photolithography tool
Optimization is an important area of research. As many optimization problems are NP-Hard it is important to have a wide selection of heuristic approaches to choose from when solving problems. Prioritized planning is a technique traditionally used to solve the multi-robot path planning problem. In th...
Saved in:
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2020
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/141780 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| Language: | English |
| Summary: | Optimization is an important area of research. As many optimization problems are NP-Hard it is important to have a wide selection of heuristic approaches to choose from when solving problems. Prioritized planning is a technique traditionally used to solve the multi-robot path planning problem. In this paper we investigate how incremental scheduling, a technique based upon prioritized planning can be applied to scheduling wafer processing in a cluster tool. For our test case our approach is shown to be capable of finding a plan of equal quality to other scheduling approaches and thus suggests our method could be of potential use in other manufacturing/material handling applications. |
|---|