RGB speckle pattern interferometry for surface metrology

Digital speckle pattern interferometry (DSPI) has been widely used for surface metrology of optically rough surfaces. Single visible wavelength can provide high measurement accuracy, but it limits the deformation measurement range of the interferometer. Also, it is difficult to reveal the shape of a...

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Main Authors: Upputuri, Paul Kumar, Rajendran, Praveenbalaji, Pramanik, Manojit
Other Authors: School of Chemical and Biomedical Engineering
Format: Conference or Workshop Item
Language:English
Published: 2021
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Online Access:https://hdl.handle.net/10356/146553
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1465532023-12-29T06:43:58Z RGB speckle pattern interferometry for surface metrology Upputuri, Paul Kumar Rajendran, Praveenbalaji Pramanik, Manojit School of Chemical and Biomedical Engineering SPIE - Quantitative Phase Imaging VI Engineering::Bioengineering RGB Interferometry Speckles Digital speckle pattern interferometry (DSPI) has been widely used for surface metrology of optically rough surfaces. Single visible wavelength can provide high measurement accuracy, but it limits the deformation measurement range of the interferometer. Also, it is difficult to reveal the shape of a rough surface with one wavelength in normal illumination and observation geometry. Using more than one visible wavelength in DSPI, one can measure large deformations as well as shape using synthetic wavelength approach. In this work, we will discuss multi-wavelength speckle pattern interferometry using a Bayer RGB sensor. The colour sensor allows simultaneous acquisition of speckle patterns at different wavelengths. The colour images acquired using RGB sensor is split in to its individual components and corresponding interference phase map is recovered using error compensating phase shifting algorithm. The wrapped phase is unwrapped to quantify the deformation or shape information of the sample under inspection. Theoretical background of RGB interferometry for deformation and shape measurements, and experimental results will be presented. Ministry of Education (MOE) National Medical Research Council (NMRC) Accepted version The authors would like to acknowledge the financial support from the Singapore Ministry of Health’s National Medical Research Council (NMRC/OFIRG/0005/2016: M4062012) and Tier 1 grant funded by Ministry of Education Singapore (RG144/18: M4012098). 2021-03-01T02:30:40Z 2021-03-01T02:30:40Z 2020 Conference Paper Upputuri, P. K., Rajendran, P., & Pramanik, M. (2020). RGB speckle pattern interferometry for surface metrology. Proceedings of SPIE - Quantitative Phase Imaging VI, 11249, 53-. doi:10.1117/12.2543916 9781510632615 https://hdl.handle.net/10356/146553 10.1117/12.2543916 2-s2.0-85082689878 11249 53 en Copyright 2020 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Engineering::Bioengineering
RGB Interferometry
Speckles
spellingShingle Engineering::Bioengineering
RGB Interferometry
Speckles
Upputuri, Paul Kumar
Rajendran, Praveenbalaji
Pramanik, Manojit
RGB speckle pattern interferometry for surface metrology
description Digital speckle pattern interferometry (DSPI) has been widely used for surface metrology of optically rough surfaces. Single visible wavelength can provide high measurement accuracy, but it limits the deformation measurement range of the interferometer. Also, it is difficult to reveal the shape of a rough surface with one wavelength in normal illumination and observation geometry. Using more than one visible wavelength in DSPI, one can measure large deformations as well as shape using synthetic wavelength approach. In this work, we will discuss multi-wavelength speckle pattern interferometry using a Bayer RGB sensor. The colour sensor allows simultaneous acquisition of speckle patterns at different wavelengths. The colour images acquired using RGB sensor is split in to its individual components and corresponding interference phase map is recovered using error compensating phase shifting algorithm. The wrapped phase is unwrapped to quantify the deformation or shape information of the sample under inspection. Theoretical background of RGB interferometry for deformation and shape measurements, and experimental results will be presented.
author2 School of Chemical and Biomedical Engineering
author_facet School of Chemical and Biomedical Engineering
Upputuri, Paul Kumar
Rajendran, Praveenbalaji
Pramanik, Manojit
format Conference or Workshop Item
author Upputuri, Paul Kumar
Rajendran, Praveenbalaji
Pramanik, Manojit
author_sort Upputuri, Paul Kumar
title RGB speckle pattern interferometry for surface metrology
title_short RGB speckle pattern interferometry for surface metrology
title_full RGB speckle pattern interferometry for surface metrology
title_fullStr RGB speckle pattern interferometry for surface metrology
title_full_unstemmed RGB speckle pattern interferometry for surface metrology
title_sort rgb speckle pattern interferometry for surface metrology
publishDate 2021
url https://hdl.handle.net/10356/146553
_version_ 1787136445998170112