RGB speckle pattern interferometry for surface metrology
Digital speckle pattern interferometry (DSPI) has been widely used for surface metrology of optically rough surfaces. Single visible wavelength can provide high measurement accuracy, but it limits the deformation measurement range of the interferometer. Also, it is difficult to reveal the shape of a...
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| Main Authors: | , , |
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| Other Authors: | |
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2021
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/146553 |
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| Institution: | Nanyang Technological University |
| Language: | English |