Simulation of diffusion mechanism of noble metal atomic layer deposition

• Main Author: Kwan, Jian Fu
• Other Authors: Alfred Tok Iing Yoong
• Format: Final Year Project
• Language: English
• Published: Nanyang Technological University 2021
• Subjects: Engineering::Materials::Metallic materials::Alloys
• Online Access: https://hdl.handle.net/10356/147677
• Institution: Nanyang Technological University

Computational methods act as a bridge between experiment and theory. They have been widely used for noble metals because noble metals play an important role in oxidation, reduction and hydrogenation reactions. Computational methods made it possible to predict the physical properties and microscopic...