A highly ordered and damage-free Ge inverted pyramid array structure for broadband antireflection in the mid-infrared

• Main Authors: Shin, Sang-Ho, Liao, Yikai, Son, Bongkwon, Zhao, Zhi-Jun, Jeong, Jun-Ho, Tan, Chuan Seng, Kim, Munho
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2022
• Subjects: Engineering::Electrical and electronic engineering; Anti-Reflection; Infrared Devices
• Online Access: https://hdl.handle.net/10356/156882
• Institution: Nanyang Technological University

With increasing demand for infrared (IR) photonics and optoelectronics, germanium (Ge) has recently regained attention due to its outstanding optical properties in the near infrared (NIR) and mid infrared (MIR) ranges. Here we present a highly ordered and damage-free microscale Ge inverted pyramid a...