A cost-effective optimized design of a 3D NAND staircase integration flow

A Cost-Effective Optimized Design of a 3D NAND Staircase Integration Flow is based on comparing new-generation technology for 3D NAND manufacturing with old-generation technology and proposes an optimized design for a process integration-based 3D NAND stepped module manufacturing process. In the new...

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Main Author: Zhang, Jinzhi
Other Authors: Fan Weijun
Format: Thesis-Master by Coursework
Language:English
Published: Nanyang Technological University 2023
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Online Access:https://hdl.handle.net/10356/166881
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1668812023-07-04T16:22:30Z A cost-effective optimized design of a 3D NAND staircase integration flow Zhang, Jinzhi Fan Weijun School of Electrical and Electronic Engineering EWJFan@ntu.edu.sg Engineering::Electrical and electronic engineering A Cost-Effective Optimized Design of a 3D NAND Staircase Integration Flow is based on comparing new-generation technology for 3D NAND manufacturing with old-generation technology and proposes an optimized design for a process integration-based 3D NAND stepped module manufacturing process. In the new generation of 3D NAND manufacturing technology, the cleaning step reaction environment has been upgraded, and the more critical etch-stop layer in this structure is no longer exhumated as it was in the old-generation technology. This design is based on this and proposes a design for optimizing the etch-stop layer protection step. The design is conceived as a controlled variable experiment, where the control group will continue to maintain all the settings of the original 3D NAND manufacturing process, while the experimental group will use the optimized process proposed in this design. This experiment also demonstrates the feasibility of the design by examining several aspects of the experimental data that do not introduce any failure modes to the subsequent process or affect the performance of the subsequent data. Finally, this design was calculated to reduce the total manufacturing time for 3D NAND by 2% and generate a cost reduction of S$10,140,000 by streamlining the process of manufacturing the modules without affecting any subsequent manufacturing process of 3D NAND and its performance. Master of Science (Green Electronics) 2023-05-11T07:37:15Z 2023-05-11T07:37:15Z 2023 Thesis-Master by Coursework Zhang, J. (2023). A cost-effective optimized design of a 3D NAND staircase integration flow. Master's thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/166881 https://hdl.handle.net/10356/166881 en application/pdf Nanyang Technological University
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Engineering::Electrical and electronic engineering
spellingShingle Engineering::Electrical and electronic engineering
Zhang, Jinzhi
A cost-effective optimized design of a 3D NAND staircase integration flow
description A Cost-Effective Optimized Design of a 3D NAND Staircase Integration Flow is based on comparing new-generation technology for 3D NAND manufacturing with old-generation technology and proposes an optimized design for a process integration-based 3D NAND stepped module manufacturing process. In the new generation of 3D NAND manufacturing technology, the cleaning step reaction environment has been upgraded, and the more critical etch-stop layer in this structure is no longer exhumated as it was in the old-generation technology. This design is based on this and proposes a design for optimizing the etch-stop layer protection step. The design is conceived as a controlled variable experiment, where the control group will continue to maintain all the settings of the original 3D NAND manufacturing process, while the experimental group will use the optimized process proposed in this design. This experiment also demonstrates the feasibility of the design by examining several aspects of the experimental data that do not introduce any failure modes to the subsequent process or affect the performance of the subsequent data. Finally, this design was calculated to reduce the total manufacturing time for 3D NAND by 2% and generate a cost reduction of S$10,140,000 by streamlining the process of manufacturing the modules without affecting any subsequent manufacturing process of 3D NAND and its performance.
author2 Fan Weijun
author_facet Fan Weijun
Zhang, Jinzhi
format Thesis-Master by Coursework
author Zhang, Jinzhi
author_sort Zhang, Jinzhi
title A cost-effective optimized design of a 3D NAND staircase integration flow
title_short A cost-effective optimized design of a 3D NAND staircase integration flow
title_full A cost-effective optimized design of a 3D NAND staircase integration flow
title_fullStr A cost-effective optimized design of a 3D NAND staircase integration flow
title_full_unstemmed A cost-effective optimized design of a 3D NAND staircase integration flow
title_sort cost-effective optimized design of a 3d nand staircase integration flow
publisher Nanyang Technological University
publishDate 2023
url https://hdl.handle.net/10356/166881
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