A cost-effective optimized design of a 3D NAND staircase integration flow
A Cost-Effective Optimized Design of a 3D NAND Staircase Integration Flow is based on comparing new-generation technology for 3D NAND manufacturing with old-generation technology and proposes an optimized design for a process integration-based 3D NAND stepped module manufacturing process. In the new...
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| Format: | Thesis-Master by Coursework |
| Language: | English |
| Published: |
Nanyang Technological University
2023
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| Online Access: | https://hdl.handle.net/10356/166881 |
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| Institution: | Nanyang Technological University |
| Language: | English |