A cost-effective optimized design of a 3D NAND staircase integration flow

• Main Author: Zhang, Jinzhi
• Other Authors: Fan Weijun
• Format: Thesis-Master by Coursework
• Language: English
• Published: Nanyang Technological University 2023
• Subjects: Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/166881
• Institution: Nanyang Technological University

A Cost-Effective Optimized Design of a 3D NAND Staircase Integration Flow is based on comparing new-generation technology for 3D NAND manufacturing with old-generation technology and proposes an optimized design for a process integration-based 3D NAND stepped module manufacturing process. In the new...