A cost-effective optimized design of a 3D NAND staircase integration flow

• المؤلف الرئيسي: Zhang, Jinzhi
• مؤلفون آخرون: Fan Weijun
• التنسيق: Thesis-Master by Coursework
• اللغة: English
• منشور في: Nanyang Technological University 2023
• الموضوعات: Engineering::Electrical and electronic engineering
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/166881
• المؤسسة: Nanyang Technological University

A Cost-Effective Optimized Design of a 3D NAND Staircase Integration Flow is based on comparing new-generation technology for 3D NAND manufacturing with old-generation technology and proposes an optimized design for a process integration-based 3D NAND stepped module manufacturing process. In the new...