MEMS-based semiconductor metal oxide gas sensors for harsh environment applications

• المؤلف الرئيسي: Liu, Haotian
• مؤلفون آخرون: Li King Ho, Holden
• التنسيق: Thesis-Doctor of Philosophy
• اللغة: English
• منشور في: Nanyang Technological University 2023
• الموضوعات: Engineering::Mechanical engineering; Engineering::Electrical and electronic engineering
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/170581

Sulphur dioxide (SO2) is a critical substance in the corrosive sulfidation of aircraft engine blades. Monitoring the local SO2 concentrations in proximity to the engines requires the sensors to be able to operate in dry environment with high temperatures. However, the prevalent commercial sensors, b...