MEMS-based semiconductor metal oxide gas sensors for harsh environment applications
Sulphur dioxide (SO2) is a critical substance in the corrosive sulfidation of aircraft engine blades. Monitoring the local SO2 concentrations in proximity to the engines requires the sensors to be able to operate in dry environment with high temperatures. However, the prevalent commercial sensors, b...
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| Format: | Thesis-Doctor of Philosophy |
| Language: | English |
| Published: |
Nanyang Technological University
2023
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| Online Access: | https://hdl.handle.net/10356/170581 |
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| Institution: | Nanyang Technological University |
| Language: | English |