MEMS-based semiconductor metal oxide gas sensors for harsh environment applications

• Main Author: Liu, Haotian
• Other Authors: Li King Ho, Holden
• Format: Thesis-Doctor of Philosophy
• Language: English
• Published: Nanyang Technological University 2023
• Subjects: Engineering::Mechanical engineering; Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/170581
• Institution: Nanyang Technological University

Sulphur dioxide (SO2) is a critical substance in the corrosive sulfidation of aircraft engine blades. Monitoring the local SO2 concentrations in proximity to the engines requires the sensors to be able to operate in dry environment with high temperatures. However, the prevalent commercial sensors, b...