Optimization of metal barrier layers for enhanced SOI-based Ge PIN photodetector performance
This thesis investigates the optimization of titanium disilicide (TiSi₂) as a metal barrier layer for germanium PIN photodetectors on silicon-on-insulator (SOI) substrates to enhance their performance in high-speed optical communication systems. The study highlights the limitations of tantalum ni...
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| 格式: | Thesis-Master by Coursework |
| 語言: | English |
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Nanyang Technological University
2025
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| 在線閱讀: | https://hdl.handle.net/10356/183095 |
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| 機構: | Nanyang Technological University |
| 語言: | English |