Numerical modeling and computer simulation for the design of a Filtered Cathodic Arc System

• Main Author: Ye, Qian.
• Other Authors: Shi, Xu
• Format: Theses and Dissertations
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Computer hardware, software and systems
• Online Access: http://hdl.handle.net/10356/19595
• Institution: Nanyang Technological University

The Filtered Cathodic Vacuum Arc (FCVA) deposition technique has received extensive attention recently due to its unique features: the arc is generated at one end of a toroidal solenoid filter, in which those ions and electrons in the arc follow the force line of the magnetic field and pass through,...