Development of the lithographic sources and processes for device fabrication

The aim of this project was to develop lithographic sources and processes for device fabrication. The NX2 was developed to become a reliable x-ray source for operation in neon.

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Bibliographic Details
Main Authors:	Wong, Terence Kin Shun, Lee, Sing, Xu, Shuyan, Lee, Paul Choon Keat, Tan, Augustine Tuck Lee, Rawat, Rajdeep Singh, Liu, Mahe, Ostrikov, Kostyantyn, Vladimir Koudriachov, Li, Yin An
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Online Access:	http://hdl.handle.net/10356/2796
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-2796
record_format	dspace
spelling	sg-ntu-dr.10356-27962023-03-04T03:24:33Z Development of the lithographic sources and processes for device fabrication Wong, Terence Kin Shun Lee, Sing Xu, Shuyan Lee, Paul Choon Keat Tan, Augustine Tuck Lee Rawat, Rajdeep Singh Liu, Mahe Ostrikov, Kostyantyn Vladimir Koudriachov Li, Yin An School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging The aim of this project was to develop lithographic sources and processes for device fabrication. The NX2 was developed to become a reliable x-ray source for operation in neon. RGM 1/99 2008-09-17T09:14:50Z 2008-09-17T09:14:50Z 2002 2002 Research Report http://hdl.handle.net/10356/2796 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging Wong, Terence Kin Shun Lee, Sing Xu, Shuyan Lee, Paul Choon Keat Tan, Augustine Tuck Lee Rawat, Rajdeep Singh Liu, Mahe Ostrikov, Kostyantyn Vladimir Koudriachov Li, Yin An Development of the lithographic sources and processes for device fabrication
description	The aim of this project was to develop lithographic sources and processes for device fabrication. The NX2 was developed to become a reliable x-ray source for operation in neon.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Wong, Terence Kin Shun Lee, Sing Xu, Shuyan Lee, Paul Choon Keat Tan, Augustine Tuck Lee Rawat, Rajdeep Singh Liu, Mahe Ostrikov, Kostyantyn Vladimir Koudriachov Li, Yin An
format	Research Report
author	Wong, Terence Kin Shun Lee, Sing Xu, Shuyan Lee, Paul Choon Keat Tan, Augustine Tuck Lee Rawat, Rajdeep Singh Liu, Mahe Ostrikov, Kostyantyn Vladimir Koudriachov Li, Yin An
author_sort	Wong, Terence Kin Shun
title	Development of the lithographic sources and processes for device fabrication
title_short	Development of the lithographic sources and processes for device fabrication
title_full	Development of the lithographic sources and processes for device fabrication
title_fullStr	Development of the lithographic sources and processes for device fabrication
title_full_unstemmed	Development of the lithographic sources and processes for device fabrication
title_sort	development of the lithographic sources and processes for device fabrication
publishDate	2008
url	http://hdl.handle.net/10356/2796
_version_	1759857575322451968

Development of the lithographic sources and processes for device fabrication

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