Development of the lithographic sources and processes for device fabrication

• Main Authors: Wong, Terence Kin Shun, Lee, Sing, Xu, Shuyan, Lee, Paul Choon Keat, Tan, Augustine Tuck Lee, Rawat, Rajdeep Singh, Liu, Mahe, Ostrikov, Kostyantyn, Vladimir Koudriachov, Li, Yin An
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
• Online Access: http://hdl.handle.net/10356/2796
• Institution: Nanyang Technological University

The aim of this project was to develop lithographic sources and processes for device fabrication. The NX2 was developed to become a reliable x-ray source for operation in neon.