Carbon-based composite coatings produced by filtered cathodic vacuum arc

• Main Authors: Tay, Beng Kang, Shi, Xu, Lau, Daniel Shu Ping
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
• Online Access: http://hdl.handle.net/10356/2837
• Institution: Nanyang Technological University

Metal-containing amorphous carbon (a-C: Me) nanocomposite films, including a-C:A1, a-C:Ti, a-C:W, a-C:Fe and a-C:Co films, were prepared by filtered cathodic vacuum arc technique using metal-containing graphite targets.