Ferroelectric thin film micro-infrared sensor and micro-actuator using surface micro-machining and laser MBE technology

• Main Author: Zhu, Weiguang.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/2899
• Institution: Nanyang Technological University

The research project titled: "Ferroelectric Thin Film Micro-Infrared Sensor and Micro-Actuator Using Surface Micro-Machining and Laser-MBE Technology" has been co-funded by Ministry of Education (MOE; JT ARC 5/00) and Agency of Science, Technology and Research (A*STAR; EMT/00/002) with total of S$999,800.00 for a period of 3.25 years (1 December 2002 - 29 February 2004; the original end date was 30 November 2003 for 3-year period, and 4-month extension was granted from A*STAR). The project has been very successfully carried out, most specifications have been met and exceeded (few cannot be met such as the number of Master students trained due to the constrains with the environment and policy), a collaborative project along with the project has been funded by a local private company, Acoustical Technologies (S) Pte Ltd, of $60,000.00, and the project has filled 2 patents, one granted and one pending, presented 5 invited papers, and published 33 referred technical papers in reputed international journals and 16 conference papers (please see the attached Publication List).