UV laser micro-machining of MEMS

• Main Authors: Yang, Lin Jiang, Gong, Thomas Haiqing
• Other Authors: School of Mechanical and Production Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Manufacturing
• Online Access: http://hdl.handle.net/10356/6931
• Institution: Nanyang Technological University

In this report, the performance of two commerically available SU-8 ultra-thick negative phtoresists, SU8-5 and SU8-50, are examined over a thickness range of 13um to 275um in a single resist spin.