UV laser micro-machining of MEMS

UV laser micro-machining of MEMS

In this report, the performance of two commerically available SU-8 ultra-thick negative phtoresists, SU8-5 and SU8-50, are examined over a thickness range of 13um to 275um in a single resist spin.

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Bibliographic Details
Main Authors: Yang, Lin Jiang, Gong, Thomas Haiqing
Other Authors: School of Mechanical and Production Engineering
Format: Research Report
Published: 2008
Subjects:
DRNTU::Engineering::Manufacturing
Online Access:http://hdl.handle.net/10356/6931
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Institution: Nanyang Technological University
id sg-ntu-dr.10356-6931
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spelling sg-ntu-dr.10356-69312020-06-01T10:44:40Z UV laser micro-machining of MEMS Yang, Lin Jiang Gong, Thomas Haiqing School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing In this report, the performance of two commerically available SU-8 ultra-thick negative phtoresists, SU8-5 and SU8-50, are examined over a thickness range of 13um to 275um in a single resist spin. RG 32/97 2008-09-17T14:37:23Z 2008-09-17T14:37:23Z 2002 2002 Research Report http://hdl.handle.net/10356/6931 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
topic DRNTU::Engineering::Manufacturing
spellingShingle DRNTU::Engineering::Manufacturing
Yang, Lin Jiang
Gong, Thomas Haiqing
UV laser micro-machining of MEMS
description In this report, the performance of two commerically available SU-8 ultra-thick negative phtoresists, SU8-5 and SU8-50, are examined over a thickness range of 13um to 275um in a single resist spin.
author2 School of Mechanical and Production Engineering
author_facet School of Mechanical and Production Engineering
Yang, Lin Jiang
Gong, Thomas Haiqing
format Research Report
author Yang, Lin Jiang
Gong, Thomas Haiqing
author_sort Yang, Lin Jiang
title UV laser micro-machining of MEMS
title_short UV laser micro-machining of MEMS
title_full UV laser micro-machining of MEMS
title_fullStr UV laser micro-machining of MEMS
title_full_unstemmed UV laser micro-machining of MEMS
title_sort uv laser micro-machining of mems
publishDate 2008
url http://hdl.handle.net/10356/6931
_version_ 1681058091727060992

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