UV laser micro-machining of MEMS

UV laser micro-machining of MEMS

In this report, the performance of two commerically available SU-8 ultra-thick negative phtoresists, SU8-5 and SU8-50, are examined over a thickness range of 13um to 275um in a single resist spin.

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Bibliographic Details
Main Authors: Yang, Lin Jiang, Gong, Thomas Haiqing
Other Authors: School of Mechanical and Production Engineering
Format: Research Report
Published: 2008
Subjects:
DRNTU::Engineering::Manufacturing
Online Access:http://hdl.handle.net/10356/6931
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Institution: Nanyang Technological University
Description
Summary:In this report, the performance of two commerically available SU-8 ultra-thick negative phtoresists, SU8-5 and SU8-50, are examined over a thickness range of 13um to 275um in a single resist spin.

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