Ferroelectric thin film micro-infrared sensor and micro-actuator using surface micro-machining and laser MBE technology

• Main Author: Zhu, Weiguang.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/2899
• Institution: Nanyang Technological University

The research project titled: "Ferroelectric Thin Film Micro-Infrared Sensor and Micro-Actuator Using Surface Micro-Machining and Laser-MBE Technology" has been co-funded by Ministry of Education (MOE; JT ARC 5/00) and Agency of Science, Technology and Research (A*STAR; EMT/00/002) with tot...