Ferroelectric thin film micro-infrared sensor and micro-actuator using surface micro-machining and laser MBE technology

The research project titled: "Ferroelectric Thin Film Micro-Infrared Sensor and Micro-Actuator Using Surface Micro-Machining and Laser-MBE Technology" has been co-funded by Ministry of Education (MOE; JT ARC 5/00) and Agency of Science, Technology and Research (A*STAR; EMT/00/002) with tot...

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Bibliographic Details
Main Author: Zhu, Weiguang.
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/2899
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Institution: Nanyang Technological University
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