Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology
In the report, the application of new sensing material and the material processing technology routes were discussed. Firstly, in the application of ferroelectric materials for hydrogen gas detection, a new metal-ferroelectric (MF) interface sensor structure has been designed, fabricated and characte...
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| Format: | Research Report |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/3037 |
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| Institution: | Nanyang Technological University |
| Summary: | In the report, the application of new sensing material and the material processing technology routes were discussed. Firstly, in the application of ferroelectric materials for hydrogen gas detection, a new metal-ferroelectric (MF) interface sensor structure has been designed, fabricated and characterized. Secondly, the work on the semiconductor iron oxide Fe203-based thick film gas sensor aims to improve on the gas sensing performance through the use of a different material processing technique. |
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