Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology

Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology

In the report, the application of new sensing material and the material processing technology routes were discussed. Firstly, in the application of ferroelectric materials for hydrogen gas detection, a new metal-ferroelectric (MF) interface sensor structure has been designed, fabricated and characte...

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Main Author: Zhu, Weiguang
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Published: 2008
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
Online Access:http://hdl.handle.net/10356/3037
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Institution: Nanyang Technological University
id sg-ntu-dr.10356-3037
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spelling sg-ntu-dr.10356-30372023-03-04T03:21:30Z Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology Zhu, Weiguang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Semiconductors In the report, the application of new sensing material and the material processing technology routes were discussed. Firstly, in the application of ferroelectric materials for hydrogen gas detection, a new metal-ferroelectric (MF) interface sensor structure has been designed, fabricated and characterized. Secondly, the work on the semiconductor iron oxide Fe203-based thick film gas sensor aims to improve on the gas sensing performance through the use of a different material processing technique. RG 69/94 2008-09-17T09:19:19Z 2008-09-17T09:19:19Z 1998 1998 Research Report http://hdl.handle.net/10356/3037 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
Zhu, Weiguang
Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology
description In the report, the application of new sensing material and the material processing technology routes were discussed. Firstly, in the application of ferroelectric materials for hydrogen gas detection, a new metal-ferroelectric (MF) interface sensor structure has been designed, fabricated and characterized. Secondly, the work on the semiconductor iron oxide Fe203-based thick film gas sensor aims to improve on the gas sensing performance through the use of a different material processing technique.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Zhu, Weiguang
format Research Report
author Zhu, Weiguang
author_sort Zhu, Weiguang
title Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology
title_short Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology
title_full Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology
title_fullStr Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology
title_full_unstemmed Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology
title_sort fabrication and characterization of semiconductor gas senors by metallo-organic decomposition (mod) and thick film technology
publishDate 2008
url http://hdl.handle.net/10356/3037
_version_ 1759854852469424128

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