Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology
In the report, the application of new sensing material and the material processing technology routes were discussed. Firstly, in the application of ferroelectric materials for hydrogen gas detection, a new metal-ferroelectric (MF) interface sensor structure has been designed, fabricated and characte...
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| Format: | Research Report |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/3037 |
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| Institution: | Nanyang Technological University |