Fabrication and characterization of semiconductor gas senors by Metallo-Organic Decomposition (MOD) and thick film technology

• المؤلف الرئيسي: Zhu, Weiguang
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: Research Report
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/3037

In the report, the application of new sensing material and the material processing technology routes were discussed. Firstly, in the application of ferroelectric materials for hydrogen gas detection, a new metal-ferroelectric (MF) interface sensor structure has been designed, fabricated and characte...