Demonstration lithography using plasma focus soft x-ray source

To demonstrate the soft x-ray source(SXR) developed and to gain experience in handling SXR masks and resists.

Saved in:

Bibliographic Details
Main Authors:	Lee, Sing, Wong, Terence Kin Shun, Feng, Xianping, Lee, Paul Choon Keat, Springham, Stuart V., Serban, Adrian, Liu, Mahe, Kudryashov, Vladimir, Gribkov, Vladimir A., Rajdeep Singh Rawat
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Online Access:	http://hdl.handle.net/10356/3044
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-3044
record_format	dspace
spelling	sg-ntu-dr.10356-30442023-03-04T03:19:41Z Demonstration lithography using plasma focus soft x-ray source Lee, Sing Wong, Terence Kin Shun Feng, Xianping Lee, Paul Choon Keat Springham, Stuart V. Serban, Adrian Liu, Mahe Kudryashov, Vladimir Gribkov, Vladimir A. Rajdeep Singh Rawat School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging To demonstrate the soft x-ray source(SXR) developed and to gain experience in handling SXR masks and resists. RG 12/97 2008-09-17T09:19:24Z 2008-09-17T09:19:24Z 2000 2000 Research Report http://hdl.handle.net/10356/3044 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging Lee, Sing Wong, Terence Kin Shun Feng, Xianping Lee, Paul Choon Keat Springham, Stuart V. Serban, Adrian Liu, Mahe Kudryashov, Vladimir Gribkov, Vladimir A. Rajdeep Singh Rawat Demonstration lithography using plasma focus soft x-ray source
description	To demonstrate the soft x-ray source(SXR) developed and to gain experience in handling SXR masks and resists.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Lee, Sing Wong, Terence Kin Shun Feng, Xianping Lee, Paul Choon Keat Springham, Stuart V. Serban, Adrian Liu, Mahe Kudryashov, Vladimir Gribkov, Vladimir A. Rajdeep Singh Rawat
format	Research Report
author	Lee, Sing Wong, Terence Kin Shun Feng, Xianping Lee, Paul Choon Keat Springham, Stuart V. Serban, Adrian Liu, Mahe Kudryashov, Vladimir Gribkov, Vladimir A. Rajdeep Singh Rawat
author_sort	Lee, Sing
title	Demonstration lithography using plasma focus soft x-ray source
title_short	Demonstration lithography using plasma focus soft x-ray source
title_full	Demonstration lithography using plasma focus soft x-ray source
title_fullStr	Demonstration lithography using plasma focus soft x-ray source
title_full_unstemmed	Demonstration lithography using plasma focus soft x-ray source
title_sort	demonstration lithography using plasma focus soft x-ray source
publishDate	2008
url	http://hdl.handle.net/10356/3044
_version_	1759853452958105600

Demonstration lithography using plasma focus soft x-ray source

Similar Items