Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab
While defects have always been a concern in wafer processing, until recently little attention has focused on backside, edge and bevel defects, simply due to the lack of suitable methods and little awareness about their effects. The variety of backside defects can have a major impact on yield and...
Saved in:
Main Author: | |
---|---|
Other Authors: | |
Format: | Theses and Dissertations |
Published: |
2008
|
Subjects: | |
Online Access: | http://hdl.handle.net/10356/3293 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Nanyang Technological University |
id |
sg-ntu-dr.10356-3293 |
---|---|
record_format |
dspace |
spelling |
sg-ntu-dr.10356-32932023-07-04T15:52:26Z Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab Chan, Jin Seng. Chen, Tupei School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging While defects have always been a concern in wafer processing, until recently little attention has focused on backside, edge and bevel defects, simply due to the lack of suitable methods and little awareness about their effects. The variety of backside defects can have a major impact on yield and scrap and ultimately production costs. The author has studied general particles and residues, "fall-on" particles that shed from the backside, edge and bevel areas of post-processed wafers and land on a wafer below, and "sticky" particles that only migrate if physically contacted. All these defects would cause either yield loss or wafer scrap. Master of Science (Microelectronics) 2008-09-17T09:26:39Z 2008-09-17T09:26:39Z 2006 2006 Thesis http://hdl.handle.net/10356/3293 Nanyang Technological University application/pdf |
institution |
Nanyang Technological University |
building |
NTU Library |
continent |
Asia |
country |
Singapore Singapore |
content_provider |
NTU Library |
collection |
DR-NTU |
topic |
DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging |
spellingShingle |
DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging Chan, Jin Seng. Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab |
description |
While defects have always been a concern in wafer processing, until recently little
attention has focused on backside, edge and bevel defects, simply due to the lack of
suitable methods and little awareness about their effects. The variety of backside defects
can have a major impact on yield and scrap and ultimately production costs. The author
has studied general particles and residues, "fall-on" particles that shed from the backside,
edge and bevel areas of post-processed wafers and land on a wafer below, and "sticky"
particles that only migrate if physically contacted. All these defects would cause either
yield loss or wafer scrap. |
author2 |
Chen, Tupei |
author_facet |
Chen, Tupei Chan, Jin Seng. |
format |
Theses and Dissertations |
author |
Chan, Jin Seng. |
author_sort |
Chan, Jin Seng. |
title |
Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab |
title_short |
Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab |
title_full |
Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab |
title_fullStr |
Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab |
title_full_unstemmed |
Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab |
title_sort |
study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab |
publishDate |
2008 |
url |
http://hdl.handle.net/10356/3293 |
_version_ |
1772825632914276352 |