Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab

While defects have always been a concern in wafer processing, until recently little attention has focused on backside, edge and bevel defects, simply due to the lack of suitable methods and little awareness about their effects. The variety of backside defects can have a major impact on yield and...

Full description

Saved in:
Bibliographic Details
Main Author: Chan, Jin Seng.
Other Authors: Chen, Tupei
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/3293
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University
id sg-ntu-dr.10356-3293
record_format dspace
spelling sg-ntu-dr.10356-32932023-07-04T15:52:26Z Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab Chan, Jin Seng. Chen, Tupei School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging While defects have always been a concern in wafer processing, until recently little attention has focused on backside, edge and bevel defects, simply due to the lack of suitable methods and little awareness about their effects. The variety of backside defects can have a major impact on yield and scrap and ultimately production costs. The author has studied general particles and residues, "fall-on" particles that shed from the backside, edge and bevel areas of post-processed wafers and land on a wafer below, and "sticky" particles that only migrate if physically contacted. All these defects would cause either yield loss or wafer scrap. Master of Science (Microelectronics) 2008-09-17T09:26:39Z 2008-09-17T09:26:39Z 2006 2006 Thesis http://hdl.handle.net/10356/3293 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
Chan, Jin Seng.
Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab
description While defects have always been a concern in wafer processing, until recently little attention has focused on backside, edge and bevel defects, simply due to the lack of suitable methods and little awareness about their effects. The variety of backside defects can have a major impact on yield and scrap and ultimately production costs. The author has studied general particles and residues, "fall-on" particles that shed from the backside, edge and bevel areas of post-processed wafers and land on a wafer below, and "sticky" particles that only migrate if physically contacted. All these defects would cause either yield loss or wafer scrap.
author2 Chen, Tupei
author_facet Chen, Tupei
Chan, Jin Seng.
format Theses and Dissertations
author Chan, Jin Seng.
author_sort Chan, Jin Seng.
title Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab
title_short Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab
title_full Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab
title_fullStr Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab
title_full_unstemmed Study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab
title_sort study of copper contamination and copper induced particles for 2nd generation 300mm wafer fab
publishDate 2008
url http://hdl.handle.net/10356/3293
_version_ 1772825632914276352