Stress measurement in copper films

The aim is to study the behaviour of copper film stack deposited on silicon wafers as a function of temperature and time by monitoring the sample curvvature during a specified thermal history.

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Bibliographic Details
Main Author:	Teo, Chee Hiang.
Other Authors:	Prasad, Krishnamachar
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:	http://hdl.handle.net/10356/3545
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-3545
record_format	dspace
spelling	sg-ntu-dr.10356-35452023-07-04T15:49:31Z Stress measurement in copper films Teo, Chee Hiang. Prasad, Krishnamachar School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials The aim is to study the behaviour of copper film stack deposited on silicon wafers as a function of temperature and time by monitoring the sample curvvature during a specified thermal history. Master of Science (Microelectronics) 2008-09-17T09:32:01Z 2008-09-17T09:32:01Z 2003 2003 Thesis http://hdl.handle.net/10356/3545 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Teo, Chee Hiang. Stress measurement in copper films
description	The aim is to study the behaviour of copper film stack deposited on silicon wafers as a function of temperature and time by monitoring the sample curvvature during a specified thermal history.
author2	Prasad, Krishnamachar
author_facet	Prasad, Krishnamachar Teo, Chee Hiang.
format	Theses and Dissertations
author	Teo, Chee Hiang.
author_sort	Teo, Chee Hiang.
title	Stress measurement in copper films
title_short	Stress measurement in copper films
title_full	Stress measurement in copper films
title_fullStr	Stress measurement in copper films
title_full_unstemmed	Stress measurement in copper films
title_sort	stress measurement in copper films
publishDate	2008
url	http://hdl.handle.net/10356/3545
_version_	1772827134365007872

Stress measurement in copper films

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