Significance of process exhaust system on wafer fab operation and its performance improvement

• Main Author: Vedachalam Natanasabapathy
• Other Authors: Prasad, Krishnamachar
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
• Online Access: http://hdl.handle.net/10356/3624
• Institution: Nanyang Technological University

The technological advances, in IC manufacturing, imposes stringent conditions on the production environment, cost and time. The challenge to the Fab designer is to develop a facility, which can satisfy these increasing demands. Semiconductor fabrication is an energy-intensive manufacturing process,...