Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices

Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices

Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices.

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Bibliographic Details
Main Author: Chen, Xiaofeng.
Other Authors: Zhu, Weiguang
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:http://hdl.handle.net/10356/3882
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Institution: Nanyang Technological University
id sg-ntu-dr.10356-3882
record_format dspace
spelling sg-ntu-dr.10356-38822023-07-04T15:41:49Z Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices Chen, Xiaofeng. Zhu, Weiguang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices. Doctor of Philosophy (EEE) 2008-09-17T09:39:39Z 2008-09-17T09:39:39Z 2001 2001 Thesis http://hdl.handle.net/10356/3882 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Chen, Xiaofeng.
Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices
description Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices.
author2 Zhu, Weiguang
author_facet Zhu, Weiguang
Chen, Xiaofeng.
format Theses and Dissertations
author Chen, Xiaofeng.
author_sort Chen, Xiaofeng.
title Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices
title_short Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices
title_full Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices
title_fullStr Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices
title_full_unstemmed Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices
title_sort ferroelectric thin films using rf sputtering and sol-gel technology for electronic devices
publishDate 2008
url http://hdl.handle.net/10356/3882
_version_ 1772825771692261376

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