Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices

• Main Author: Chen, Xiaofeng.
• Other Authors: Zhu, Weiguang
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/3882
• Institution: Nanyang Technological University

Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices.