Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices

Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices.

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Bibliographic Details
Main Author: Chen, Xiaofeng.
Other Authors: Zhu, Weiguang
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/3882
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Institution: Nanyang Technological University
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