Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices

• المؤلف الرئيسي: Chen, Xiaofeng.
• مؤلفون آخرون: Zhu, Weiguang
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/3882

Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices.