Fabrication of efficient micro- axicon by direct electron beam lithography for long non- diffracting distance of bessel beams

• Main Author: Zhang, Lesheng
• Other Authors: Yuan, Xiaocong
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic packaging
• Online Access: http://hdl.handle.net/10356/3982
• Institution: Nanyang Technological University

In this thesis, a novel technique has been employed in the realization of micro-axicon by single-step processing via electron beam lithography (EBL). The proposed technique is a simple, reliable and reproducible method for the production of high quality Bessel beams with long propagation invariant d...