Characterization of piezoelectric films and mems devices by scanning interferometer

• المؤلف الرئيسي: Chia, Meng Wei.
• مؤلفون آخرون: Zhu Weiguang
• التنسيق: Final Year Project
• اللغة: English
• منشور في: 2010
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/40174

In recent years the increasing demand of MEMS and piezoelectric technology has driven the research in that particular field, a measuring method for displacement with very high resolution will be required. Piezoelectricity is the ability of some materials, which exhibit the deformation of material pr...