Characterization of piezoelectric films and mems devices by scanning interferometer
In recent years the increasing demand of MEMS and piezoelectric technology has driven the research in that particular field, a measuring method for displacement with very high resolution will be required. Piezoelectricity is the ability of some materials, which exhibit the deformation of material pr...
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Main Author: | Chia, Meng Wei. |
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Other Authors: | Zhu Weiguang |
Format: | Final Year Project |
Language: | English |
Published: |
2010
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Subjects: | |
Online Access: | http://hdl.handle.net/10356/40174 |
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Institution: | Nanyang Technological University |
Language: | English |
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