Characterization of piezoelectric films and mems devices by scanning interferometer

• Main Author: Chia, Meng Wei.
• Other Authors: Zhu Weiguang
• Format: Final Year Project
• Language: English
• Published: 2010
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/40174
• Institution: Nanyang Technological University

In recent years the increasing demand of MEMS and piezoelectric technology has driven the research in that particular field, a measuring method for displacement with very high resolution will be required. Piezoelectricity is the ability of some materials, which exhibit the deformation of material pr...