Characterization of piezoelectric films and mems devices by scanning interferometer

• 主要作者: Chia, Meng Wei.
• 其他作者: Zhu Weiguang
• 格式: Final Year Project
• 語言: English
• 出版: 2010
• 主題: DRNTU::Engineering::Electrical and electronic engineering
• 在線閱讀: http://hdl.handle.net/10356/40174

In recent years the increasing demand of MEMS and piezoelectric technology has driven the research in that particular field, a measuring method for displacement with very high resolution will be required. Piezoelectricity is the ability of some materials, which exhibit the deformation of material pr...