Ferroelectric films for MEMS type devices using novel hybrid processing technology
Lead zirconate titanate (PZT) films are promising for MEMS type micro- devices applications because of their extremely high electromechanical coupling coefficients and excellent piezoelectric response. PZT piezoelectric film integrated on silicon substrate has been the subject of considerable attent...
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| 格式: | Theses and Dissertations |
| 出版: |
2008
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| 在線閱讀: | https://hdl.handle.net/10356/4021 |
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| 機構: | Nanyang Technological University |