Optical coatings using filtered cathodic vacuum arc technique

The objectives of this thesis are to stabilize the cathode source and also deposit stoichiometric aluminum oxide films. Firstly, the arc spot phenomena is study and what parameters influence the stability of the arc are conducted in experiments.

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Bibliographic Details
Main Author: Choong, Yoon Shin.
Other Authors: Shi, Xu
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/4160
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Institution: Nanyang Technological University
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spelling sg-ntu-dr.10356-41602023-07-04T15:14:02Z Optical coatings using filtered cathodic vacuum arc technique Choong, Yoon Shin. Shi, Xu School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics The objectives of this thesis are to stabilize the cathode source and also deposit stoichiometric aluminum oxide films. Firstly, the arc spot phenomena is study and what parameters influence the stability of the arc are conducted in experiments. Master of Engineering 2008-09-17T09:45:47Z 2008-09-17T09:45:47Z 1999 1999 Thesis http://hdl.handle.net/10356/4160 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Choong, Yoon Shin.
Optical coatings using filtered cathodic vacuum arc technique
description The objectives of this thesis are to stabilize the cathode source and also deposit stoichiometric aluminum oxide films. Firstly, the arc spot phenomena is study and what parameters influence the stability of the arc are conducted in experiments.
author2 Shi, Xu
author_facet Shi, Xu
Choong, Yoon Shin.
format Theses and Dissertations
author Choong, Yoon Shin.
author_sort Choong, Yoon Shin.
title Optical coatings using filtered cathodic vacuum arc technique
title_short Optical coatings using filtered cathodic vacuum arc technique
title_full Optical coatings using filtered cathodic vacuum arc technique
title_fullStr Optical coatings using filtered cathodic vacuum arc technique
title_full_unstemmed Optical coatings using filtered cathodic vacuum arc technique
title_sort optical coatings using filtered cathodic vacuum arc technique
publishDate 2008
url http://hdl.handle.net/10356/4160
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