Optical coatings using filtered cathodic vacuum arc technique
The objectives of this thesis are to stabilize the cathode source and also deposit stoichiometric aluminum oxide films. Firstly, the arc spot phenomena is study and what parameters influence the stability of the arc are conducted in experiments.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/4160 |
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| Institution: | Nanyang Technological University |
| Summary: | The objectives of this thesis are to stabilize the cathode source and also deposit stoichiometric aluminum oxide films. Firstly, the arc spot phenomena is study and what parameters influence the stability of the arc are conducted in experiments. |
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