Optical coatings using filtered cathodic vacuum arc technique
The objectives of this thesis are to stabilize the cathode source and also deposit stoichiometric aluminum oxide films. Firstly, the arc spot phenomena is study and what parameters influence the stability of the arc are conducted in experiments.
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2008
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sg-ntu-dr.10356-41602023-07-04T15:14:02Z Optical coatings using filtered cathodic vacuum arc technique Choong, Yoon Shin. Shi, Xu School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics The objectives of this thesis are to stabilize the cathode source and also deposit stoichiometric aluminum oxide films. Firstly, the arc spot phenomena is study and what parameters influence the stability of the arc are conducted in experiments. Master of Engineering 2008-09-17T09:45:47Z 2008-09-17T09:45:47Z 1999 1999 Thesis http://hdl.handle.net/10356/4160 Nanyang Technological University application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NTU Library |
| collection |
DR-NTU |
| topic |
DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics |
| spellingShingle |
DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Choong, Yoon Shin. Optical coatings using filtered cathodic vacuum arc technique |
| description |
The objectives of this thesis are to stabilize the cathode source and also deposit stoichiometric aluminum oxide films. Firstly, the arc spot phenomena is study and what parameters influence the stability of the arc are conducted in experiments. |
| author2 |
Shi, Xu |
| author_facet |
Shi, Xu Choong, Yoon Shin. |
| format |
Theses and Dissertations |
| author |
Choong, Yoon Shin. |
| author_sort |
Choong, Yoon Shin. |
| title |
Optical coatings using filtered cathodic vacuum arc technique |
| title_short |
Optical coatings using filtered cathodic vacuum arc technique |
| title_full |
Optical coatings using filtered cathodic vacuum arc technique |
| title_fullStr |
Optical coatings using filtered cathodic vacuum arc technique |
| title_full_unstemmed |
Optical coatings using filtered cathodic vacuum arc technique |
| title_sort |
optical coatings using filtered cathodic vacuum arc technique |
| publishDate |
2008 |
| url |
http://hdl.handle.net/10356/4160 |
| _version_ |
1772826063814000640 |