Fabrication and characterization of ISFET for PH measurements

• المؤلف الرئيسي: Jiang, Chao
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/4437
• المؤسسة: Nanyang Technological University

We have successfully fabricated, assembled and characterized the ISFET devices for pH measurement. After electrical measurement on wafer-level to confine the wafer fabrication process, the fabricated wafer was cut into individual ISFET dice. The ISFET dice was then mounted on printing circuit board...