Fabrication and characterization of ISFET for PH measurements

Fabrication and characterization of ISFET for PH measurements

We have successfully fabricated, assembled and characterized the ISFET devices for pH measurement. After electrical measurement on wafer-level to confine the wafer fabrication process, the fabricated wafer was cut into individual ISFET dice. The ISFET dice was then mounted on printing circuit board...

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Bibliographic Details
Main Author: Jiang, Chao
Other Authors: School of Electrical and Electronic Engineering
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Online Access:http://hdl.handle.net/10356/4437
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Institution: Nanyang Technological University
Description
Summary:We have successfully fabricated, assembled and characterized the ISFET devices for pH measurement. After electrical measurement on wafer-level to confine the wafer fabrication process, the fabricated wafer was cut into individual ISFET dice. The ISFET dice was then mounted on printing circuit board (PCB).

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